| |
數位式真空計（Vacuum Gauges）
ZSE型真空計
量測範圍：大氣壓 ~ 1 Torr 
|
Power：DC 12~24V
|
|
Pressure：0~ -760mmHg
|
|
One or two control set points
|
PC-L 型真空計
量測範圍：大氣壓 ~ 10-3 Torr
|
Controller
|
|
Measurement Range
|
1.0×10-3 to 9.9×10+2 Torr
|
|
Gas Calibration
|
Air/Nitrogen
|
|
Units of Measure
|
Torr, mbar
|
|
Display
|
Green
LED with Scientific notation
2 digit mantissa
1 digit exponent
|
|
Two process control set
points
|
|
Full range 90 ~ 260 Vac power input
|
|
Gauge tube type：
GRANVILLE-PHILLIPS 275 CONVECTRON gauge tube
|
PC-H 型真空計 量測範圍：760~ 1.0×10-9 Torr
Controller |
Measurement Range |
1.0×10-9 to 760 Torr |
Gas Calibration |
Air/Nitrogen |
Units of Measure |
Torr, mbar |
Display |
Green LED |
3 process control set points (option) |
Pirani Gauge Tube：1.0×10-3 to 760 Torr |
Active inverted Magnetron Gauge：AIM-S-NW25
1.0× 10-9 to 2.5× 10-3 Torr（Edwards High Vacuum Inc.） |
|
 |
|
